Invention Application
- Patent Title: VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME
- Patent Title (中): 垂直存储器件及其制造方法
-
Application No.: US14534181Application Date: 2014-11-06
-
Publication No.: US20150137216A1Publication Date: 2015-05-21
- Inventor: Seok-Won LEE , Joon-Hee LEE , Dong-Seog EUN , Chang-Hyun LEE
- Applicant: Seok-Won LEE , Joon-Hee LEE , Dong-Seog EUN , Chang-Hyun LEE
- Priority: KR10-2013-0140354 20131119
- Main IPC: H01L27/115
- IPC: H01L27/115 ; G11C5/06

Abstract:
A vertical memory device includes a substrate, a channel, gate lines and a connecting portion. A plurality of the channels extend in a first direction which is vertical to a top surface of a substrate. A plurality of the gate lines are stacked in the first direction to be spaced apart from each other and extend in a second, lengthwise direction, each gate line intersecting a set of channels and surrounding outer sidewalls of each channel of the set of channels. The gate lines forms a stepped structure which includes a plurality of vertical levels. A connecting portion connects a group of gate lines of the plurality of gate lines located at the same vertical level, the connecting portion diverging from the second direction in which the gate lines of the group of gate lines extend.
Public/Granted literature
- US09640549B2 Vertical memory device with gate lines at the same level connected Public/Granted day:2017-05-02
Information query
IPC分类: