发明申请
- 专利标题: VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME
- 专利标题(中): 垂直存储器件及其制造方法
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申请号: US14517025申请日: 2014-10-17
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公开(公告)号: US20150145021A1公开(公告)日: 2015-05-28
- 发明人: Byong-Hyun Jang , Dong-Chul Yoo , Ki-Hyun Hwang , Phil-Ouk Nam , Jae-Young Ahn
- 申请人: Byong-Hyun Jang , Dong-Chul Yoo , Ki-Hyun Hwang , Phil-Ouk Nam , Jae-Young Ahn
- 优先权: KR10-2013-0145724 20131127
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L29/51
摘要:
Nonvolatile memory devices include at least four cylindrical-shaped channel regions, which extend vertically from portions of a substrate located at respective vertices of at least one rhomboid when viewed in a vertical direction relative to a surface of the substrate. A charge storage layer (e.g., ONO layer) is provided on an outer sidewall of each of the cylindrical-shaped channel regions. In addition, to achieve a high degree of integration, a plurality of vertically-stacked gate electrodes are provided, which extend adjacent each of the cylindrical-shaped channel regions.
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