Invention Application
- Patent Title: FLEXIBLE MICROMACHINED TRANSDUCER DEVICE AND METHOD FOR FABRICATING SAME
- Patent Title (中): 柔性微型传感器装置及其制造方法
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Application No.: US14103672Application Date: 2013-12-11
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Publication No.: US20150158052A1Publication Date: 2015-06-11
- Inventor: Dimitre Latev , Arman Hajati , Darren Todd Imai , Ut Tran
- Applicant: Dimitre Latev , Arman Hajati , Darren Todd Imai , Ut Tran
- Main IPC: B06B1/02
- IPC: B06B1/02 ; B06B1/06 ; H01L41/04 ; B32B37/24

Abstract:
Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.
Public/Granted literature
- US09525119B2 Flexible micromachined transducer device and method for fabricating same Public/Granted day:2016-12-20
Information query
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