发明申请
- 专利标题: METAL CHALCOGENIDE THIN FILM AND PREPARING METHOD THEREOF
- 专利标题(中): 金属氯化铝薄膜及其制备方法
-
申请号: US14565885申请日: 2014-12-10
-
公开(公告)号: US20150159265A1公开(公告)日: 2015-06-11
- 发明人: Tae Sung KIM , Chi Sung AHN , Changgu LEE , Hyeongu KIM , Jinhwan LEE , Girish ARABALE
- 申请人: Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
- 申请人地址: KR Suwon-si
- 专利权人: Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
- 当前专利权人: Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2013-0152849 20131210
- 主分类号: C23C14/54
- IPC分类号: C23C14/54 ; C23C14/06 ; C23C14/08 ; C01G39/06
摘要:
Provided herein is a metal chalcogenide thin film and a method for preparing the metal chalcogenide thin film, the method including forming a metal layer on a substrate; and forming a metal chalcogenide thin film by inserting the substrate into a chamber for low temperature vapor deposition, injecting a gas containing chalcogen atoms and an argon gas into the chamber, generating a plasma such that chalcogen atoms decomposed by the plasma chemically combine with metal atoms constituting the metal layer to form the metal chalcogenide thin film.
信息查询
IPC分类: