Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Patent Title (中): 半导体器件及制造半导体器件的方法
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Application No.: US14560745Application Date: 2014-12-04
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Publication No.: US20150162396A1Publication Date: 2015-06-11
- Inventor: Ryoutaro YAGI , Satoshi KAGEYAMA
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Priority: JP2013-255344 20131210
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L21/308 ; H01L27/01

Abstract:
A semiconductor device includes a first etching stopper film and a second etching stopper film that are formed to be spaced apart from one another on a first inter-layer insulating film; a metal thin film resistor formed to extend over the first and second etching stopper films; a second inter-layer insulating film formed on the first inter-layer insulating film to cover the first and second etching stopper films and the metal thin film resistor; a first contact hole formed in the second inter-layer insulating film to extend from a surface of the second inter-layer insulating film onto the first etching stopper film by penetrating through the metal thin film resistor; and a second contact hole formed in the second inter-layer insulating film to extend from a surface of the second inter-layer insulating film onto the second etching stopper film by penetrating through the metal thin film resistor.
Public/Granted literature
- US09240439B2 Semiconductor device and method for manufacturing semiconductor device Public/Granted day:2016-01-19
Information query
IPC分类: