发明申请
- 专利标题: REDUCED EXPANSION THERMAL COMPRESSION BONDING PROCESS BOND HEAD
- 专利标题(中): 减少膨胀热压结合工艺粘结头
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申请号: US14132812申请日: 2013-12-18
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公开(公告)号: US20150171047A1公开(公告)日: 2015-06-18
- 发明人: Pramod Malatkar , Hemanth Dhavaleswarapu , James Neeb
- 申请人: Intel Corporation
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; B29C65/18
摘要:
Embodiments of a thermal compression bonding process bond head and a method for producing a thermal compression bonding process bond head are disclosed. In some embodiments, the bond head includes a thermal compression bonding process heater and a cooling block coupled to the heater through an annular structure. The annular structure surrounds a lower portion of the cooling block and couples the cooling block to the heater such that there is no direct mechanical contact between the cooling block and the heater.
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