发明申请
US20150171047A1 REDUCED EXPANSION THERMAL COMPRESSION BONDING PROCESS BOND HEAD 有权
减少膨胀热压结合工艺粘结头

REDUCED EXPANSION THERMAL COMPRESSION BONDING PROCESS BOND HEAD
摘要:
Embodiments of a thermal compression bonding process bond head and a method for producing a thermal compression bonding process bond head are disclosed. In some embodiments, the bond head includes a thermal compression bonding process heater and a cooling block coupled to the heater through an annular structure. The annular structure surrounds a lower portion of the cooling block and couples the cooling block to the heater such that there is no direct mechanical contact between the cooling block and the heater.
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