发明申请
- 专利标题: METHOD FOR FABRICATING A NANO STRUCTURE
- 专利标题(中): 制作纳米结构的方法
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申请号: US14312353申请日: 2014-06-23
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公开(公告)号: US20150174656A1公开(公告)日: 2015-06-25
- 发明人: Jun-Hyung KIM
- 申请人: SK INNOVATION CO., LTD.
- 优先权: KR10-2013-0159761 20131219; KR10-2013-0159762 20131219; KR10-2013-0159763 20131219
- 主分类号: B22F1/00
- IPC分类号: B22F1/00 ; C23C16/06 ; C23C16/455
摘要:
Provided are a nano structure, a fabrication method thereof, and an application device thereof. The method for fabricating a nano structure includes: forming a substrate; forming a plurality of linkers over the substrate; forming a plurality of metal ions over the linkers; and forming one or more metallic nanoparticles over the linkers.
公开/授权文献
- US09793123B2 Method for fabricating a nano structure 公开/授权日:2017-10-17