Invention Application
US20150180209A1 VERTICAL CAVITY SURFACE EMITTING LASER AND ATOMIC OSCILLATOR 有权
垂直孔表面发射激光和原子振荡器

  • Patent Title: VERTICAL CAVITY SURFACE EMITTING LASER AND ATOMIC OSCILLATOR
  • Patent Title (中): 垂直孔表面发射激光和原子振荡器
  • Application No.: US14573622
    Application Date: 2014-12-17
  • Publication No.: US20150180209A1
    Publication Date: 2015-06-25
  • Inventor: Satoshi TAKENAKAYuji KURACHI
  • Applicant: Seiko Epson Corporation
  • Priority: JP2013-263467 20131220
  • Main IPC: H01S5/183
  • IPC: H01S5/183
VERTICAL CAVITY SURFACE EMITTING LASER AND ATOMIC OSCILLATOR
Abstract:
A vertical cavity surface emitting laser includes: a substrate; a first mirror layer which is provided over the substrate; an active layer which is provided over the first mirror layer; a second mirror layer which is provided over the active layer; a first electrode and a second electrode which are electrically connected to the first mirror layer and are separated from each other; and a third electrode which is electrically connected to the second mirror layer, wherein the first mirror layer, the active layer, and the second mirror layer configure a laminated body, the laminated body includes a resonance portion which resonates light generated in the active layer, in a plan view, an insulation layer surrounding the laminated body is provided, and in the plan view, the insulation layer is provided between the first electrode and the second electrode.
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