Invention Application
- Patent Title: EFFICIENT OPTICAL PROXIMITY CORRECTION REPAIR FLOW METHOD AND APPARATUS
- Patent Title (中): 有效的光学临近修正维修方法和装置
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Application No.: US14146771Application Date: 2014-01-03
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Publication No.: US20150192866A1Publication Date: 2015-07-09
- Inventor: Guoxiang NING , Christopher SPENCE , Paul ACKMANN , Chin Teong LIM
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A method and apparatus for an efficient optical proximity correction (OPC) repair flow is disclosed. Embodiments may include receiving an input data stream of an integrated circuit (IC) design layout, performing one or more iterations of an OPC step and a layout polishing step on the input data stream, and performing a smart enhancement step if an output of a last iteration of the OPC step fails to satisfy one or more layout criteria and if a number of the one or more iterations satisfies a threshold value. Additional embodiments may include performing a pattern insertion process cross-linked with the OPC step, the pattern insertion process being a base optical rule check (ORC) process.
Public/Granted literature
- US09250538B2 Efficient optical proximity correction repair flow method and apparatus Public/Granted day:2016-02-02
Information query
IPC分类: