Invention Application
- Patent Title: METHOD, APPARATUS AND SYSTEM FOR A TRANSFERABLE MICROMACHINED PIEZOELECTRIC TRANSDUCER ARRAY
- Patent Title (中): 可转移微电子压电传感器阵列的方法,装置和系统
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Application No.: US14152899Application Date: 2014-01-10
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Publication No.: US20150200350A1Publication Date: 2015-07-16
- Inventor: Arman Hajati , Ut Tran , Darren Imai , Martin Schoeppler
- Applicant: Arman Hajati , Ut Tran , Darren Imai , Martin Schoeppler
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H01L41/25 ; H01L41/33 ; H01L41/047 ; B06B1/06

Abstract:
Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.
Public/Granted literature
- US09604255B2 Method, apparatus and system for a transferable micromachined piezoelectric transducer array Public/Granted day:2017-03-28
Information query
IPC分类: