公开(公告)号：US09604255B2

公开(公告)日：2017-03-28

申请号：US14152899

申请日：2014-01-10

申请人： Arman Hajati ,  Ut Tran ,  Darren Todd Imai ,  Martin Schoeppler

发明人： Arman Hajati ,  Ut Tran ,  Darren Todd Imai ,  Martin Schoeppler

IPC分类号： H01L41/33 ,  B06B1/06 ,  H01L41/09 ,  H01L41/313 ,  H01L41/331

CPC分类号： B06B1/0622 ,  B06B1/0688 ,  H01L41/098 ,  H01L41/313 ,  H01L41/331 ,  Y10T29/42

摘要： Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

公开(公告)号：US20100253721A1

公开(公告)日：2010-10-07

申请号：US12416756

申请日：2009-04-01

申请人： Nobuo Matsumoto ,  Andreas Bibl ,  Martin Schoeppler ,  Deane A. Gardner ,  John C. Batterton

发明人： Nobuo Matsumoto ,  Andreas Bibl ,  Martin Schoeppler ,  Deane A. Gardner ,  John C. Batterton

IPC分类号： B41J29/38

CPC分类号： B41J3/28 ,  B41J11/06 ,  B41J13/103

摘要： A device for depositing drops includes a head configured to eject drops on a region of a substrate; a stage configured to hold the substrate while the head ejects drops on the region of the substrate; a first transporting device configured to transport the substrate in a transporting direction onto the stage; and a second transporting device configured to transport the substrate in the transporting direction off the stage. The stage and at least one of the first transporting device or the second transporting device are movable together in the transporting direction.

摘要翻译： 用于沉积液滴的装置包括头部，头部构造成在基底的区域上喷射液滴; 一个构造成在头部喷射在衬底的区域上时保持衬底的阶段; 第一输送装置，其构造成将所述基板沿输送方向输送到所述载物台上; 以及第二输送装置，其构造成将所述基板沿所述输送方向输送出所述载物台。 第一输送装置或第二输送装置中的载物台和至少一个可沿输送方向一起移动。

公开(公告)号：US08191979B2

公开(公告)日：2012-06-05

申请号：US12416756

申请日：2009-04-01

申请人： Nobuo Matsumoto ,  Andreas Bibl ,  Martin Schoeppler ,  Deane A. Gardner ,  John C. Batterton

发明人： Nobuo Matsumoto ,  Andreas Bibl ,  Martin Schoeppler ,  Deane A. Gardner ,  John C. Batterton

IPC分类号： B41J29/38 ,  B41J2/01

CPC分类号： B41J3/28 ,  B41J11/06 ,  B41J13/103

摘要： A device for depositing drops includes a head configured to eject drops on a region of a substrate; a stage configured to hold the substrate while the head ejects drops on the region of the substrate; a first transporting device configured to transport the substrate in a transporting direction onto the stage; and a second transporting device configured to transport the substrate in the transporting direction off the stage. The stage and at least one of the first transporting device or the second transporting device are movable together in the transporting direction.

摘要翻译： 用于沉积液滴的装置包括头部，头部构造成在基底的区域上喷射液滴; 一个构造成在头部喷射在衬底的区域上时保持衬底的阶段; 第一输送装置，其构造成将所述基板沿输送方向输送到所述载物台上; 以及第二输送装置，其构造成将所述基板沿所述输送方向输送出所述载物台。 第一输送装置或第二输送装置中的载物台和至少一个可沿输送方向一起移动。

公开(公告)号：US07427119B2

公开(公告)日：2008-09-23

申请号：US11484975

申请日：2006-07-11

申请人： Andreas Bibl ,  Martin Schoeppler

发明人： Andreas Bibl ,  Martin Schoeppler

IPC分类号： B41J29/393

CPC分类号： B41J2/1433 ,  B01L3/0268 ,  B01L2200/148 ,  B01L2400/0439 ,  B41J2/14233 ,  B41J2/15 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J3/543 ,  Y10T29/49401

摘要： A method includes ejecting liquid having a first composition from a first droplet ejection deposition system that includes a first printhead and a first fluid source, collecting information on the behavior of the liquid under a variety of ejection conditions for the first droplet ejection deposition system, and ejecting liquid having the first material composition from a second droplet ejection deposition system that includes a second printhead and a second fluid source under the selected ejection conditions. The first printhead has a small number of flow paths, and the first fluid source is configured to hold a small volume of liquid. The second printhead has a plurality of substantially identical flow paths, each of the flow paths being substantially identical to at least one of the small number of flow paths, and there being a significantly larger number of flow paths in the second printhead than in the first printhead.

摘要翻译： 一种方法包括从包括第一打印头和第一流体源的第一液滴喷射沉积系统喷射具有第一组合物的液体，在第一液滴喷射沉积系统的各种喷射条件下收集关于液体的行为的信息，以及 在所选择的喷射条件下，从包括第二打印头和第二流体源的第二液滴喷射沉积系统喷射具有第一材料组成的液体。 第一打印头具有少量的流动路径，并且第一流体源构造成保持少量的液体。 第二打印头具有多个基本上相同的流动路径，每个流动路径基本上与少数流动路径中的至少一个相同，并且在第二打印头中存在明显大于第一打印头中的流动路径数量 打印头。

公开(公告)号：US07600849B2

公开(公告)日：2009-10-13

申请号：US12140173

申请日：2008-06-16

申请人： Andreas Bibl ,  Martin Schoeppler

发明人： Andreas Bibl ,  Martin Schoeppler

IPC分类号： B41J29/393

CPC分类号： B41J2/1433 ,  B01L3/0268 ,  B01L2200/148 ,  B01L2400/0439 ,  B41J2/14233 ,  B41J2/15 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J3/543 ,  Y10T29/49401

摘要： A method includes ejecting liquid having a first composition from a first droplet ejection deposition system that includes a first printhead and a first fluid source, collecting information on the behavior of the liquid under a variety of ejection conditions for the first droplet ejection deposition system, and ejecting liquid having the first material composition from a second droplet ejection deposition system that includes a second printhead and a second fluid source under the selected ejection conditions. The first printhead has a small number of flow paths, and the first fluid source is configured to hold a small volume of liquid. The second printhead has a plurality of substantially identical flow paths, each of the flow paths being substantially identical to at least one of the small number of flow paths, and there being a significantly larger number of flow paths in the second printhead than in the first printhead.

摘要翻译： 一种方法包括从包括第一打印头和第一流体源的第一液滴喷射沉积系统喷射具有第一组合物的液体，在第一液滴喷射沉积系统的各种喷射条件下收集关于液体的行为的信息，以及 在所选择的喷射条件下，从包括第二打印头和第二流体源的第二液滴喷射沉积系统喷射具有第一材料组成的液体。 第一打印头具有少量的流动路径，并且第一流体源构造成保持少量的液体。 第二打印头具有多个基本上相同的流动路径，每个流动路径基本上与少数流动路径中的至少一个相同，并且在第二打印头中存在明显大于第一打印头中的流动路径数量 打印头。

公开(公告)号：US20080246792A1

公开(公告)日：2008-10-09

申请号：US12140173

申请日：2008-06-16

申请人： Andreas Bibl ,  Martin Schoeppler

发明人： Andreas Bibl ,  Martin Schoeppler

IPC分类号： B41J29/38

CPC分类号： B41J2/1433 ,  B01L3/0268 ,  B01L2200/148 ,  B01L2400/0439 ,  B41J2/14233 ,  B41J2/15 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J3/543 ,  Y10T29/49401

摘要： A method includes ejecting liquid having a first composition from a first droplet ejection deposition system that includes a first printhead and a first fluid source, collecting information on the behavior of the liquid under a variety of ejection conditions for the first droplet ejection deposition system, and ejecting liquid having the first material composition from a second droplet ejection deposition system that includes a second printhead and a second fluid source under the selected ejection conditions. The first printhead has a small number of flow paths, and the first fluid source is configured to hold a small volume of liquid. The second printhead has a plurality of substantially identical flow paths, each of the flow paths being substantially identical to at least one of the small number of flow paths, and there being a significantly larger number of flow paths in the second printhead than in the first printhead.

摘要翻译： 一种方法包括从包括第一打印头和第一流体源的第一液滴喷射沉积系统喷射具有第一组合物的液体，在第一液滴喷射沉积系统的各种喷射条件下收集关于液体的行为的信息，以及 在所选择的喷射条件下，从包括第二打印头和第二流体源的第二液滴喷射沉积系统喷射具有第一材料组成的液体。 第一打印头具有少量的流动路径，并且第一流体源构造成保持少量的液体。 第二打印头具有多个基本上相同的流动路径，每个流动路径基本上与少数流动路径中的至少一个相同，并且在第二打印头中存在明显大于第一打印头中的流动路径数量 打印头。

公开(公告)号：US20150200350A1

公开(公告)日：2015-07-16

申请号：US14152899

申请日：2014-01-10

申请人： Arman Hajati ,  Ut Tran ,  Darren Imai ,  Martin Schoeppler

发明人： Arman Hajati ,  Ut Tran ,  Darren Imai ,  Martin Schoeppler

IPC分类号： H01L41/053 ,  H01L41/25 ,  H01L41/33 ,  H01L41/047 ,  B06B1/06

CPC分类号： B06B1/0622 ,  B06B1/0688 ,  H01L41/098 ,  H01L41/313 ,  H01L41/331 ,  Y10T29/42

摘要： Techniques and mechanisms to provide mechanical support for a micromachined piezoelectric transducer array. In an embodiment, a transducer array includes transducer elements each comprising a respective membrane portion and a respective supporting structure disposed on or around a periphery of that membrane portion. The transducer elements are initially formed on a sacrificial wafer, wherein supporting structures of the transducer elements facilitate subsequent removal of the sacrificial wafer and/or subsequent handling of the transducer elements. In another embodiment, a polymer layer is disposed on the transducer elements to provide for flexible support during such subsequent handling.

摘要翻译： 为微加工压电换能器阵列提供机械支撑的技术和机制。 在一个实施例中，换能器阵列包括换能器元件，每个换能器元件包括设置在该膜部分的周边上或周围的相应的膜部分和相应的支撑结构。 换能器元件最初形成在牺牲晶片上，其中换能器元件的支撑结构有助于随后去除牺牲晶片和/或随后处理换能器元件。 在另一个实施方案中，聚合物层设置在换能器元件上以在随后的处理期间提供柔性支撑。

公开(公告)号：US20070035579A1

公开(公告)日：2007-02-15

申请号：US11484975

申请日：2006-07-11

申请人： Andreas Bibl ,  Martin Schoeppler

发明人： Andreas Bibl ,  Martin Schoeppler

IPC分类号： B41J2/15

CPC分类号： B41J2/1433 ,  B01L3/0268 ,  B01L2200/148 ,  B01L2400/0439 ,  B41J2/14233 ,  B41J2/15 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J3/543 ,  Y10T29/49401

摘要： A method includes ejecting liquid having a first composition from a first droplet ejection deposition system that includes a first printhead and a first fluid source, collecting information on the behavior of the liquid under a variety of ejection conditions for the first droplet ejection deposition system, and ejecting liquid having the first material composition from a second droplet ejection deposition system that includes a second printhead and a second fluid source under the selected ejection conditions. The first printhead has a small number of flow paths, and the first fluid source is configured to hold a small volume of liquid. The second printhead has a plurality of substantially identical flow paths, each of the flow paths being substantially identical to at least one of the small number of flow paths, and there being a significantly larger number of flow paths in the second printhead than in the first printhead.

摘要翻译： 一种方法包括从包括第一打印头和第一流体源的第一液滴喷射沉积系统喷射具有第一组合物的液体，在第一液滴喷射沉积系统的各种喷射条件下收集关于液体的行为的信息，以及 在所选择的喷射条件下，从包括第二打印头和第二流体源的第二液滴喷射沉积系统喷射具有第一材料组成的液体。 第一打印头具有少量的流动路径，并且第一流体源构造成保持少量的液体。 第二打印头具有多个基本上相同的流动路径，每个流动路径基本上与少数流动路径中的至少一个相同，并且在第二打印头中存在明显大于第一打印头中的流动路径数量 打印头。