Invention Application
- Patent Title: PLASMA PROCESSING APPARATUS
- Patent Title (中): 等离子体加工设备
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Application No.: US14600224Application Date: 2015-01-20
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Publication No.: US20150206713A1Publication Date: 2015-07-23
- Inventor: Norihiko AMIKURA , Norikazu SASAKI , Atsushi SAWACHI
- Applicant: TOKYO ELECTRON LIMITED
- Priority: JP2014-008113 20140120
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67

Abstract:
Processing gases respectively supplied from multiple gas supply lines into a processing vessel can be switched at a high speed in a uniform manner. A plasma processing apparatus includes the processing vessel configured to perform therein a plasma process to a target substrate; and a gas inlet member including first gas discharge holes and second gas discharge holes which are alternately arranged to be adjacent to each other and respectively communicate with a first gas supply line and a second gas supply line, which are switchable. Further, the first gas discharge holes and the second gas discharge holes independently and respectively introduce a first processing gas and a second processing gas, which are respectively supplied from the first gas supply line and the second gas supply line and used in the plasma process, into the processing vessel.
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