发明申请
- 专利标题: Tuning A Parameter Associated With Plasma Impedance
- 专利标题(中): 调整与等离子体阻抗相关的参数
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申请号: US14673567申请日: 2015-03-30
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公开(公告)号: US20150206717A1公开(公告)日: 2015-07-23
- 发明人: John C. Valcore, JR. , Bradford J. Lyndaker
- 申请人: Lam Research Corporation
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H05H1/46
摘要:
Systems and methods for tuning a parameter associated with plasma impedance are described. One of the methods includes receiving information to determine a variable. The information is measured at a transmission line and is measured when the parameter has a first value. The transmission line is used to provide power to a plasma chamber. The method further includes determining whether the variable is at a local minima and providing the first value to tune the impedance matching circuit upon determining that the variable is at the local minima. The method includes changing the first value to a second value of the parameter upon determining that the variable is not at the local minima and determining whether the variable is at a local minima when the parameter has the second value.
公开/授权文献
- US09320127B2 Tuning a parameter associated with plasma impedance 公开/授权日:2016-04-19
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