发明申请
US20150206717A1 Tuning A Parameter Associated With Plasma Impedance 审中-公开
调整与等离子体阻抗相关的参数

Tuning A Parameter Associated With Plasma Impedance
摘要:
Systems and methods for tuning a parameter associated with plasma impedance are described. One of the methods includes receiving information to determine a variable. The information is measured at a transmission line and is measured when the parameter has a first value. The transmission line is used to provide power to a plasma chamber. The method further includes determining whether the variable is at a local minima and providing the first value to tune the impedance matching circuit upon determining that the variable is at the local minima. The method includes changing the first value to a second value of the parameter upon determining that the variable is not at the local minima and determining whether the variable is at a local minima when the parameter has the second value.
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