发明申请
US20150206738A1 Surface Cleaning Method and Apparatus Using Surface Acoustic Wave Devices
审中-公开
表面清洗方法和使用表面声波装置的设备
- 专利标题： Surface Cleaning Method and Apparatus Using Surface Acoustic Wave Devices
- 专利标题（中）： 表面清洗方法和使用表面声波装置的设备
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申请号： US14159970申请日： 2014-01-21
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公开(公告)号： US20150206738A1公开(公告)日： 2015-07-23
- 发明人: Abbas Rastegar
- 申请人： SEMATECH, Inc.
- 申请人地址： US NY Albany
- 专利权人： SEMATECH, Inc.
- 当前专利权人： SEMATECH, Inc.
- 当前专利权人地址： US NY Albany
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; B08B3/12
摘要：
An apparatus, system, and method for cleaning surfaces is presented. One embodiment of the system includes an array of surface acoustic wave (SAW) transducers coupled to a substrate. The system may include a positioning mechanism coupled to at least one of a target surface or the array of SAW transducers, and configured to position the array of SAW transducers within an effective cleaning distance of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of SAW transducers to the target surface. The system may further include a controller coupled to the array of SAW transducers and configured to activate the array of SAW transducers. At least one of the SAW transducers may be formed to focus cleaning liquid on a focal point and jet cleaning liquid in a direction substantially out of the place of the SAW transducer.
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