Invention Application
US20150206821A1 THERMAL INTERFACE MATERIAL FOR INTEGRATED CIRCUIT PACKAGE AND METHOD OF MAKING THE SAME
审中-公开
用于集成电路封装的热接口材料及其制造方法
- Patent Title: THERMAL INTERFACE MATERIAL FOR INTEGRATED CIRCUIT PACKAGE AND METHOD OF MAKING THE SAME
- Patent Title (中): 用于集成电路封装的热接口材料及其制造方法
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Application No.: US14674769Application Date: 2015-03-31
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Publication No.: US20150206821A1Publication Date: 2015-07-23
- Inventor: Sam Ziqun ZHAO , Arpit Mittal , Rezaur Rahman Khan
- Applicant: Broadcom Corporation
- Applicant Address: US CA Irvine
- Assignee: Broadcom Corporation
- Current Assignee: Broadcom Corporation
- Current Assignee Address: US CA Irvine
- Main IPC: H01L23/373
- IPC: H01L23/373 ; F28F21/02 ; F28F21/08 ; H01L21/48

Abstract:
In an embodiment, a thermal interface material (TIM) is provided. The TIM includes first and a second layers of a first transition metal, and a third layer including a plurality of carbon nanotubes supported in a flexible polymer matrix and a second transition metal coupled to sidewalls of carbon nanotubes. The first and second metal layers are in contact with first and second ends of carbon nanotube. The TIM further includes fourth and fifth layers of an alloy material coupled to the first and second metal layers, respectively. The carbon nanotube based TIM including the layers with transition metal allow improved heat transfer from an integrated circuit die to a heat spreader.
Information query
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