发明申请
- 专利标题: THIN FILM TRANSISTOR AND DISPLAY DEVICE
- 专利标题(中): 薄膜晶体管和显示器件
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申请号: US14416213申请日: 2013-08-30
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公开(公告)号: US20150206978A1公开(公告)日: 2015-07-23
- 发明人: Aya Miki , Shinya Morita , Hiroshi Goto , Hiroaki Tao , Toshihiro Kugimiya
- 申请人: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- 申请人地址: JP Kobe-shi, Hyogo
- 专利权人: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- 当前专利权人: Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
- 当前专利权人地址: JP Kobe-shi, Hyogo
- 优先权: JP2012-192666 20120831; JP2013-094087 20130426
- 国际申请: PCT/JP2013/073372 WO 20130830
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L27/12 ; H01L29/51
摘要:
Provided is a thin film transistor comprising an oxide semiconductor thin film layer and has a threshold voltage that does not change much due to light, a bias stress or the like, thereby exhibiting excellent stress stability. A thin film transistor of the present invention is provided with: a gate electrode; two or more oxide semiconductor layers that are used as a channel layer; an etch stopper layer for protecting the surfaces of the oxide semiconductor layers; a source-drain electrode; and a gate insulator film interposed between the gate electrode and the channel layer. The metal elements constituting an oxide semiconductor layer that is in direct contact with the gate insulator film are In, Zn and Sn. The hydrogen concentration in the gate insulator film, which is in direct contact with the oxide semiconductor layer, is controlled to 4 atomic % or less.
公开/授权文献
- US09318507B2 Thin film transistor and display device 公开/授权日:2016-04-19
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