发明申请
US20150214475A1 PATTERN FORTIFICATION FOR HDD BIT PATTERNED MEDIA PATTERN TRANSFER
有权
用于硬盘位图形图形图形传输的图案化
- 专利标题： PATTERN FORTIFICATION FOR HDD BIT PATTERNED MEDIA PATTERN TRANSFER
- 专利标题（中）： 用于硬盘位图形图形图形传输的图案化
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申请号： US14677761申请日： 2015-04-02
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公开(公告)号： US20150214475A1公开(公告)日： 2015-07-30
- 发明人: Roman GOUK , Steven VERHAVERBEKE , Alexander KONTOS , Adolph Miller ALLEN , Kevin MORAES
- 申请人： Applied Materials, Inc.
- 主分类号： H01L43/12
- IPC分类号： H01L43/12 ; H01F41/34
摘要：
A method and apparatus for forming a magnetic layer having a pattern of magnetic properties on a substrate is described. The method includes using a metal nitride hardmask layer to pattern the magnetic layer by plasma exposure. The metal nitride layer is patterned using a nanoimprint patterning process with a silicon oxide pattern negative material. The pattern is developed in the metal nitride using a halogen and oxygen containing remote plasma, and is removed after plasma exposure using a caustic wet strip process. All processing is done at low temperatures to avoid thermal damage to magnetic materials.
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