发明申请
- 专利标题: METHOD FOR DEPOSITING A COATING AND A COATED CUTTING TOOL
- 专利标题(中): 沉积涂层和涂层切割工具的方法
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申请号: US14403762申请日: 2013-05-28
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公开(公告)号: US20150225840A1公开(公告)日: 2015-08-13
- 发明人: Jon Andersson , Mats Johansson Joesaar , Jacob Sjolen
- 申请人: SECO TOOLS AB
- 优先权: EP12169796.5 20120529
- 国际申请: PCT/EP2013/060902 WO 20130528
- 主分类号: C23C14/32
- IPC分类号: C23C14/32 ; C23C14/34 ; C23C14/35 ; B23C5/00 ; C23C14/06
摘要:
A method for depositing a hard and wear resistant layer onto a tool body of a hard alloy of, for example, cemented carbide, cermet, ceramics, cubic boron nitride based material or high speed steel, includes depositing the layer by highly ionised physical vapour deposition using elemental, composite and/or alloyed source material comprising the elements Me, where Me is one or more of Ti, V, Cr, Y, Zr, Nb, Mo, Hf, Ta, W, B, Al, and Si, using a process gas o one or more of the elements C, N, O, and S, and applying a first substrate bias potential, Ub1, where −900 V 0.05Dtot, and applying a second substrate bias potential, Ub2, where 150 V
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