Invention Application
- Patent Title: Method of Calibrating a Reluctance Actuator Assembly, Reluctance Actuator and Lithographic Apparatus Comprising Such Reluctance Actuator
- Patent Title (中): 磁阻驱动器组件，磁阻驱动器和平版印刷设备校准方法
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Application No.: US14428287Application Date: 2013-08-26
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Publication No.: US20150234297A1Publication Date: 2015-08-20
- Inventor: Johannes Antonius Gerardus Akkermans , Bas Pieter Lemmen , Sjoerd Martijn Huiberts , Joeri Lof , Petrus Theodorus Rutgers , Sven Antoin Johan Hol , Harmeet Singh , Peter Michel Silvester Maria Heijmans
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- International Application: PCT/EP2013/067623 WO 20130826
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/22 ; H02P25/06 ; H02P25/08 ; H02K41/03 ; H02K11/00
Abstract:
A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.
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