Invention Application
US20150243567A1 ELECTRON RADIATION MONITORING ELECTRODE SYSTEM TO PREVENT GOLD SPITTING AND RESIST CROSS-LINKING DURING EVAPORATION
审中-公开
电子辐射监测电极系统，用于在蒸发期间防止黄金泄漏和电阻交叉
- Patent Title: ELECTRON RADIATION MONITORING ELECTRODE SYSTEM TO PREVENT GOLD SPITTING AND RESIST CROSS-LINKING DURING EVAPORATION
- Patent Title (中): 电子辐射监测电极系统，用于在蒸发期间防止黄金泄漏和电阻交叉
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Application No.: US14700361Application Date: 2015-04-30
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Publication No.: US20150243567A1Publication Date: 2015-08-27
- Inventor: Kezia Cheng
- Applicant: SKYWORKS SOLUTIONS, INC.
- Main IPC: H01L21/66
- IPC: H01L21/66 ; C23C14/30 ; C23C14/54 ; G01N27/00
Abstract:
An electrode system configured to be positioned within a vacuum chamber of an electron-beam metal evaporation and deposition apparatus including a metal slug from which metal is evaporated during operation of the electron-beam metal evaporation and deposition apparatus. The electrode system includes a substantially ring-shaped electrode formed of a conductive material and a plurality of insulating standoffs configured to support the substantially ring-shaped electrode in the vacuum chamber in a position substantially surrounding the metal slug.
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