Invention Application
US20150248944A1 ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME 有权
使用相同的ABERRATION CORRECTOR和充电颗粒光束装置

ABERRATION CORRECTOR AND CHARGED PARTICLE BEAM APPARATUS USING THE SAME
Abstract:
Provided are an aberration corrector that reduces irregularity of a magnetic field of a multipole to obtain an image of high resolution and a charged particle beam apparatus using the same. The aberration corrector includes a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.
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