发明申请
- 专利标题: LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS
- 专利标题(中): 激光室和放射性气体激光装置
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申请号: US14694743申请日: 2015-04-23
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公开(公告)号: US20150249312A1公开(公告)日: 2015-09-03
- 发明人: Hiroaki TSUSHIMA , Hakaru MIZOGUCHI , Junichi FUJIMOTO , Hiroaki NAKARAI , Natsushi SUZUKI
- 申请人: GIGAPHOTON INC.
- 申请人地址: JP Oyama-shi
- 专利权人: GIGAPHOTON INC.
- 当前专利权人: GIGAPHOTON INC.
- 当前专利权人地址: JP Oyama-shi
- 优先权: JP2012243790 20121105
- 主分类号: H01S3/036
- IPC分类号: H01S3/036 ; H01S3/097 ; H01S3/223 ; H01S3/038 ; H01S3/225
摘要:
There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.
公开/授权文献
- US09373926B2 Laser chamber and discharge excitation gas laser apparatus 公开/授权日:2016-06-21
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