发明申请
US20150253258A1 SUBSTRATE DAMAGE DETECTION DEVICE, SUBSTRATE TRANSFER ROBOT WITH SUBSTRATE DAMAGE DETECTION DEVICE, AND SUBSTRATE DAMAGE DETECTION METHOD
有权
基板损坏检测装置，具有基板损坏检测装置的基板转移机器人，以及基板损坏检测方法
- 专利标题： SUBSTRATE DAMAGE DETECTION DEVICE, SUBSTRATE TRANSFER ROBOT WITH SUBSTRATE DAMAGE DETECTION DEVICE, AND SUBSTRATE DAMAGE DETECTION METHOD
- 专利标题（中）： 基板损坏检测装置，具有基板损坏检测装置的基板转移机器人，以及基板损坏检测方法
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申请号： US14637607申请日： 2015-03-04
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公开(公告)号： US20150253258A1公开(公告)日： 2015-09-10
- 发明人: Masaru SHIMADA , Takashi NAGANO , Takumi KOBAYASHI
- 申请人： DAIHEN Corporation
- 优先权： JP2014-043726 20140306
- 主分类号： G01N21/88
- IPC分类号： G01N21/88 ; G06T7/00 ; H01L21/677 ; B25J9/16 ; H01L21/67 ; G01N21/93 ; B65G65/00
摘要：
A substrate damage detection device is configured to be mounted to a substrate transfer robot provided with a slidably-movable substrate support. The substrate damage detection device includes an image obtainer and a damage detector. The image obtainer, such as a camera, is configured to obtain an image of the periphery of a substrate placed on the substrate support of the transfer robot. The damage detector is configured to detect damage made to the substrate by using the image of the periphery obtained by the image obtainer.
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