Invention Application
- Patent Title: SEMICONDUCTOR DEVICE WITH LOW-K SPACERS
- Patent Title (中): 具有低K间隔的半导体器件
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Application No.: US14711196Application Date: 2015-05-13
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Publication No.: US20150255561A1Publication Date: 2015-09-10
- Inventor: Xiuyu Cai , Ruilong Xie , Xunyuan Zhang
- Applicant: GLOBALFOUNDRIES Inc.
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/78

Abstract:
One method disclosed herein includes forming at least one sacrificial sidewall spacer adjacent a sacrificial gate structure that is formed above a semiconducting substrate, removing at least a portion of the sacrificial gate structure to thereby define a gate cavity that is laterally defined by the sacrificial spacer, forming a replacement gate structure in the gate cavity, removing the sacrificial spacer to thereby define a spacer cavity adjacent the replacement gate structure, and forming a low-k spacer in the spacer cavity. A novel device disclosed herein includes a gate structure positioned above a semiconducting substrate, wherein the gate insulation layer has two upstanding portions that are substantially vertically oriented relative to an upper surface of the substrate. The device further includes a low-k sidewall spacer positioned adjacent each of the vertically oriented upstanding portions of the gate insulation layer.
Public/Granted literature
- US09425280B2 Semiconductor device with low-K spacers Public/Granted day:2016-08-23
Information query
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