发明申请
- 专利标题: SEMICONDUCTOR DEVICE WITH LOW-K SPACERS
- 专利标题(中): 具有低K间隔的半导体器件
-
申请号: US14711196申请日: 2015-05-13
-
公开(公告)号: US20150255561A1公开(公告)日: 2015-09-10
- 发明人: Xiuyu Cai , Ruilong Xie , Xunyuan Zhang
- 申请人: GLOBALFOUNDRIES Inc.
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 主分类号: H01L29/49
- IPC分类号: H01L29/49 ; H01L29/78
摘要:
One method disclosed herein includes forming at least one sacrificial sidewall spacer adjacent a sacrificial gate structure that is formed above a semiconducting substrate, removing at least a portion of the sacrificial gate structure to thereby define a gate cavity that is laterally defined by the sacrificial spacer, forming a replacement gate structure in the gate cavity, removing the sacrificial spacer to thereby define a spacer cavity adjacent the replacement gate structure, and forming a low-k spacer in the spacer cavity. A novel device disclosed herein includes a gate structure positioned above a semiconducting substrate, wherein the gate insulation layer has two upstanding portions that are substantially vertically oriented relative to an upper surface of the substrate. The device further includes a low-k sidewall spacer positioned adjacent each of the vertically oriented upstanding portions of the gate insulation layer.
公开/授权文献
- US09425280B2 Semiconductor device with low-K spacers 公开/授权日:2016-08-23
信息查询
IPC分类: