Invention Application
US20150263286A1 APPARATUS AND METHOD FOR FORMING ORGANIC THIN FILM AND MANUFACTURING METHOD OF ORGANIC THIN FILM DEVICE USING THE SAME 有权
用于形成有机薄膜的装置和方法及使用其的有机薄膜装置的制造方法

  • Patent Title: APPARATUS AND METHOD FOR FORMING ORGANIC THIN FILM AND MANUFACTURING METHOD OF ORGANIC THIN FILM DEVICE USING THE SAME
  • Patent Title (中): 用于形成有机薄膜的装置和方法及使用其的有机薄膜装置的制造方法
  • Application No.: US14715878
    Application Date: 2015-05-19
  • Publication No.: US20150263286A1
    Publication Date: 2015-09-17
  • Inventor: Jin Hyoung LEEGeun Sik CHOIl Soo MOONYong Sul SONG
  • Applicant: AMOGREENTECH CO., LTD.
  • Priority: KR10-2012-0133720 20121123; KR10-2012-0133729 20121123
  • Main IPC: H01L51/00
  • IPC: H01L51/00 H01L51/50 H01L51/56 H01L51/52
APPARATUS AND METHOD FOR FORMING ORGANIC THIN FILM AND MANUFACTURING METHOD OF ORGANIC THIN FILM DEVICE USING THE SAME
Abstract:
Provided is an organic thin film forming apparatus, an organic thin film forming method, and a method of manufacturing an organic thin film device using the same, in which an organic light-emitting layer (photoactive layer) and/or an electron transport layer can be formed on a substrate when an organic light emitting diode (OLED) or an organic solar cell is manufactured. The organic thin film forming apparatus includes: a solution spray unit for spraying a solution on a substrate; and a hot gas spray unit for spraying a hot gas onto fine liquid droplets that have been sprayed from the solution spray unit and that are in flight, to thereby evaporate a solvent contained in the fine liquid droplets.
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