公开(公告)号：US20150263286A1

公开(公告)日：2015-09-17

申请号：US14715878

申请日：2015-05-19

Applicant: AMOGREENTECH CO., LTD.

Inventor： Jin Hyoung LEE ,  Geun Sik CHO ,  Il Soo MOON ,  Yong Sul SONG

IPC: H01L51/00 ,  H01L51/50 ,  H01L51/56 ,  H01L51/52

CPC classification number: H01L51/0007 ,  B05B7/16 ,  H01L51/0003 ,  H01L51/0008 ,  H01L51/0029 ,  H01L51/0097 ,  H01L51/5012 ,  H01L51/5056 ,  H01L51/5072 ,  H01L51/5092 ,  H01L51/5206 ,  H01L51/5221 ,  H01L51/56 ,  H01L2251/5338 ,  Y02E10/549 ,  Y02P70/521

Abstract: Provided is an organic thin film forming apparatus, an organic thin film forming method, and a method of manufacturing an organic thin film device using the same, in which an organic light-emitting layer (photoactive layer) and/or an electron transport layer can be formed on a substrate when an organic light emitting diode (OLED) or an organic solar cell is manufactured. The organic thin film forming apparatus includes: a solution spray unit for spraying a solution on a substrate; and a hot gas spray unit for spraying a hot gas onto fine liquid droplets that have been sprayed from the solution spray unit and that are in flight, to thereby evaporate a solvent contained in the fine liquid droplets.

Abstract translation: 本发明提供一种有机薄膜形成装置，有机薄膜形成方法和使用该薄膜形成方法的有机薄膜器件的制造方法，其中有机发光层（光活性层）和/或电子传输层可以 当制造有机发光二极管（OLED）或有机太阳能电池时，在基板上形成。 有机薄膜形成装置包括：溶液喷射单元，用于将溶液喷射在基板上; 以及热气体喷射单元，用于将热气体喷射到已经从溶液喷射单元喷射并处于飞行状态的细小液滴上，从而蒸发细液滴中所含的溶剂。