Invention Application
US20150264792A1 LASER BEAM CONTROLLING DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS 有权
激光束控制装置和极光超紫外灯发光装置

  • Patent Title: LASER BEAM CONTROLLING DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
  • Patent Title (中): 激光束控制装置和极光超紫外灯发光装置
  • Application No.: US14724636
    Application Date: 2015-05-28
  • Publication No.: US20150264792A1
    Publication Date: 2015-09-17
  • Inventor: Toru SUZUKIOsamu WAKABAYASHI
  • Applicant: GIGAPHOTON INC.
  • Priority: JP2012-279637 20121221
  • Main IPC: H05G2/00
  • IPC: H05G2/00 G02B27/14 H01S3/00
LASER BEAM CONTROLLING DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
Abstract:
A laser beam controlling device may include: a guide laser device; a guide laser beam wavefront adjuster provided in a beam path of the guide laser beam outputted from the guide laser device; a beam combiner configured to adjust travel directions of a laser beam outputted from a laser system and the guide laser beam outputted from the guide laser beam wavefront adjuster to coincide with each other, a both beam wavefront adjuster provided in a beam path of both the laser beam and the guide laser beam outputted from the beam combiner, a beam monitor provided in a beam path of both the laser beam and the guide laser beam outputted from the both beam wavefront adjuster, and a controller configured to control the guide laser beam wavefront adjuster and the both beam wavefront adjuster based on detection results at the beam monitor with respect to both the laser beam and the guide laser beam.
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