-
公开(公告)号：US20180146536A1
公开(公告)日：2018-05-24
申请号：US15860137
申请日：2018-01-02
Applicant: Gigaphoton Inc.
Inventor： Toru SUZUKI , Tamotsu ABE , Osamu WAKABAYASHI , Tatsuya YANAGIDA
CPC classification number: H05G2/008 , G03F7/70033 , H05G2/003 , H05G2/005
Abstract: An extreme ultraviolet light generation apparatus may include: a chamber including a plasma generation region to which a target is supplied, the target being turned into plasma so that extreme ultraviolet light is generated in the chamber; a target supply part configured to supply the target to the plasma generation region by outputting the target as a droplet into the chamber; a droplet detector configured to detect the droplet traveling from the target supply part to the plasma generation region; an imaging part configured to capture an image of an imaging region containing the plasma generation region in the chamber; and a controller configured to control an imaging timing at which the imaging part captures the image of the imaging region, based on a detection timing at which the droplet detector detects the droplet.
-
公开(公告)号：US20140111635A1
公开(公告)日：2014-04-24
申请号：US14061295
申请日：2013-10-23
Applicant: GIGAPHOTON INC.
Inventor： Toru SUZUKI , Hiroshi TANAKA , Hideyuki HAYASHI , Osamu WAKABAYASHI
CPC classification number: H05G2/008 , G06T7/20 , G06T7/246 , G06T2207/30241 , H05G2/003 , H05G2/006
Abstract: In an extreme ultraviolet light generation apparatus, a target detection section may include a light source, a transfer optical system, an image sensor configured to output image data of an image that has been formed by irradiating a target outputted from a target supply device with light outputted from the light source on a light-receiving unit of the image sensor by the transfer optical system, and a processing unit, connected to the image sensor, configured to receive the image data, obtain a first optical intensity distribution along a first line that intersects with a trajectory of the target and a second optical intensity distribution along a second line that intersects with the trajectory, calculate a center of gravity position in the first optical intensity distribution and a center of gravity position in the second optical intensity distribution, and calculate an actual path of the target based on the calculated positions.
Abstract translation: 在极紫外光发生装置中，目标检测部可以包括光源，转印光学系统，图像传感器，被配置为输出通过用光照射从目标供给装置输出的目标而形成的图像的图像数据 通过所述传送光学系统从所述图像传感器的光接收单元从所述光源输出的图像数据;以及处理单元，连接到所述图像传感器，被配置为接收所述图像数据，沿着第一行获得第一光强分布， 与目标的轨迹相交，沿着与轨迹相交的第二线的第二光强分布，计算第一光强度分布中的重心位置和第二光强分布中的重心位置，并计算 基于计算出的位置的目标的实际路径。
-
公开(公告)号：US20180077785A1
公开(公告)日：2018-03-15
申请号：US15807067
申请日：2017-11-08
Applicant: Gigaphoton Inc.
Inventor： Toru SUZUKI , Kotaro MIYASHITA , Yoshifumi UENO , Takuya ISHII
IPC: H05G2/00
Abstract: Output timing of laser light is controlled with high accuracy. An extreme ultraviolet light generation device may include a chamber in which plasma is generated to generate extreme ultraviolet light, a window provided in the chamber, an optical path pipe connected to the chamber, a light source disposed in the optical path pipe and configured to output light into the chamber via the window, a gas supply unit configured to supply gas into the optical path pipe, and an exhaust port configured to discharge the gas in the optical path pipe to an outside of the optical path pipe.
-
公开(公告)号：US20170250517A1
公开(公告)日：2017-08-31
申请号：US15590238
申请日：2017-05-09
Applicant: Gigaphoton Inc.
Inventor： Toru SUZUKI , Takashi SUGANUMA , Akihiro TAKAYAMA , Yoshiaki KUROSAWA
Abstract: A beam adjusting apparatus of an extreme ultraviolet light generating apparatus may include: a first pair of mirrors constituted by a first concave mirror and a first convex mirror, provided along the optical path of the pulsed laser beam; a second pair of mirrors constituted by a second concave mirror and a second convex mirror, which are arranged in an order reversed from the order of arrangement of the first concave mirror and the first convex mirror, provided along the optical path of the pulsed laser beam downstream from the first pair of mirrors; and a moving apparatus configured to simultaneously increase or simultaneously decrease the distance between the first concave mirror and the first convex mirror and the distance between the second concave mirror and the second convex mirror.
-
公开(公告)号：US20170150591A1
公开(公告)日：2017-05-25
申请号：US15422489
申请日：2017-02-02
Applicant: GIGAPHOTON INC.
Inventor： Masahiko ANDO , Yoshifumi UENO , Toru SUZUKI
IPC: H05G2/00
CPC classification number: H05G2/008 , G03F7/70033 , G03F7/70808 , G03F7/70991
Abstract: The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.
-
Patent Agency Ranking
公开(公告)号：US20150351208A1
公开(公告)日：2015-12-03
申请号：US14737262
申请日：2015-06-11
Applicant: GIGAPHOTON INC.
Inventor： Takashi SUGANUMA , Toru SUZUKI , Takahisa FUJIMAKI , Yoshiaki KUROSAWA
CPC classification number: H05G2/008 , G02F1/0136 , G02F1/09 , H01S3/005 , H01S3/0078 , H01S3/0085 , H01S3/10023 , H01S3/2232 , H01S3/2316 , H01S2301/02 , H05G2/003
Abstract: There may be included: a master oscillator configured to output pulsed laser light; a power amplifier disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and a wavelength filter disposed between the master oscillator and the power amplifier in the optical path of the pulsed laser light, and configured to allow the pulsed laser light to pass therethrough and suppress transmission of light with a wavelength other than a wavelength of the pulsed laser light.
Abstract translation: 可以包括：主振荡器，被配置为输出脉冲激光; 功率放大器，设置在脉冲激光的光路中，以放大脉冲激光; 以及布置在脉冲激光的光路中的主振荡器和功率放大器之间的波长滤波器，并且被配置为允许脉冲激光通过，并抑制具有除了脉冲激光器的波长以外的波长的光的透射 光。
-
公开(公告)号：US20180314161A1
公开(公告)日：2018-11-01
申请号：US16028896
申请日：2018-07-06
Applicant: GIGAPHOTON INC.
Inventor： Toru SUZUKI
Abstract: An extreme ultraviolet light generation device includes: a target supply unit outputting a plurality of targets along a trajectory toward a plasma generation region; a laser device emitting laser light toward the plasma generation region; an image capturing unit having an image capturing direction non-orthogonal and non-parallel to the trajectory, capturing an image of a region including the plasma generation region, and outputting image data; an illumination unit outputting illumination light to the region including the plasma generation region; an image capturing position change unit changing an image capturing position of the image capturing unit along the image capturing direction; a movement amount determination unit determining an movement amount of the image capturing position based on the image data; and a control unit controlling the image capturing position change unit based on the movement amount determined by the movement amount determination unit.
-
公开(公告)号：US20170079126A1
公开(公告)日：2017-03-16
申请号：US15361120
申请日：2016-11-25
Applicant: GIGAPHOTON INC.
Inventor： Toru SUZUKI , Takayuki YABU
IPC: H05G2/00
Abstract: A target sensor may include: a plurality of sensor elements, each of the plurality of sensor elements being configured to output a sensor signal that varies in accordance with an amount of light received on a light-receiving surface; and a signal generator configured to process the sensor signals from the plurality of sensor elements. The light-receiving surfaces of the plurality of sensor elements may be disposed at different positions in a second direction different from a first direction along which an image of the target illuminated by the illumination light may move. The signal generator may be configured to compare each of the sensor signals from the plurality of sensor elements with a threshold and output the signal indicating detection of a target to the controller in a case where at least one of the sensor signals from the plurality of sensor elements may exceed the threshold.
Abstract translation: 目标传感器可以包括：多个传感器元件，所述多个传感器元件中的每一个被配置为输出根据在光接收表面上接收的光量而变化的传感器信号; 以及信号发生器，被配置为处理来自多个传感器元件的传感器信号。 多个传感器元件的光接收表面可以设置在不同于由照明光照射的目标的图像可以移动的第一方向的第二方向上的不同位置处。 信号发生器可以被配置为在来自多个传感器元件的传感器信号中的至少一个传感器信号的情况下将来自多个传感器元件的每个传感器信号与阈值进行比较，并将指示检测到目标的信号输出到控制器 元素可能会超过阈值。
-
公开(公告)号：US20160234920A1
公开(公告)日：2016-08-11
申请号：US15017000
申请日：2014-09-17
Applicant: Gigaphoton Inc.
Inventor： Toru SUZUKI , Tamotsu ABE , Osamu WAKABAYASHI , Tatsuya YANAGIDA
IPC: H05G2/00
CPC classification number: H05G2/008 , G03F7/70033 , H05G2/003 , H05G2/005
Abstract: An extreme ultraviolet light generation apparatus may include: a chamber including a plasma generation region to which a target is supplied, the target being turned into plasma so that extreme ultraviolet light is generated in the chamber; a target supply part configured to supply the target to the plasma generation region by outputting the target as a droplet into the chamber; a droplet detector configured to detect the droplet traveling from the target supply part to the plasma generation region; an imaging part configured to capture an image of an imaging region containing the plasma generation region in the chamber; and a controller configured to control an imaging timing at which the imaging part captures the image of the imaging region, based on a detection timing at which the droplet detector detects the droplet.
Abstract translation: 极紫外光发生装置可以包括：包括供给目标物的等离子体产生区域的室，该目标变成等离子体，使得在室内产生极紫外光; 目标供给部，被配置为通过将所述目标作为液滴输出到所述室中来将所述目标供给到所述等离子体产生区域; 液滴检测器，其被配置为检测从所述目标供给部件行进到所述等离子体产生区域的液滴; 被配置为捕获在所述室中包含所述等离子体产生区域的成像区域的图像的成像部件; 以及控制器，被配置为基于液滴检测器检测到液滴的检测定时来控制成像部分捕获成像区域的图像的成像定时。
-
公开(公告)号：US20180177036A1
公开(公告)日：2018-06-21
申请号：US15895521
申请日：2018-02-13
Applicant: Gigaphoton Inc.
Inventor： Hirokazu HOSODA , Toru SUZUKI
IPC: H05G2/00
Abstract: The extreme ultraviolet light generating apparatus may include a chamber having a window through which a pulse laser beam enters, a target supply unit configured to output at least one target toward a predetermined region in the chamber, a target image capturing device configured to capture an image of the at least one target, a first actuator configured to move a focused area focused by the target image capturing device, and a controller configured to control the first actuator based on a signal from an external device.
-
-
-
-
-
-
-
-
-
Search Results
14
records
(took 0.038 seconds)
