Invention Application
- Patent Title: INTERFERENCE MEASURING DEVICE
- Patent Title (中): 干扰测量装置
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Application No.: US14679236Application Date: 2015-04-06
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Publication No.: US20150285619A1Publication Date: 2015-10-08
- Inventor: Ken MOTOHASHI , Atsushi USAMI
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Priority: JP2014-079593 20140408
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B9/02

Abstract:
An interference measuring device comprises: a light source; a beam splitter that causes the light to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light passed the reference optical path and reflection light passed the measurement optical path are combined; a reference light diverging part that causes the light diverged into the reference optical path, to further diverge into a plurality of optical paths and that causes reflection light beams respectively passed the optical paths to be input into the beam splitter; and a plurality of reference mirrors that are respectively arranged in the optical paths such that optical path lengths of the optical paths are different from each other, and that reflect reference light. An interference image is imaged by varying the optical path length of either the reference optical path or the measurement optical path.
Public/Granted literature
- US09618321B2 Interference measuring device Public/Granted day:2017-04-11
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