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    SURFACE TEXTURE MEASURING APPARATUS AND METHOD
    1.
    发明申请
    SURFACE TEXTURE MEASURING APPARATUS AND METHOD 审中-公开

    公开(公告)号：US20170248416A1

    公开(公告)日：2017-08-31

    申请号：US15430593

    申请日：2017-02-13

    Applicant: MITUTOYO CORPORATION

    Inventor： Hiroshi SAKAI ,  Tetsuya ITO ,  Ken MOTOHASHI

    IPC: G01B11/30 ,  G01B11/24

    CPC classification number: G01B11/306 ,  G01B5/003 ,  G01B5/061 ,  G01B5/12 ,  G01B11/0608 ,  G01B11/12 ,  G01B11/2441 ,  G01B11/303

    Abstract: A surface texture measuring apparatus includes: a measurement sensor measuring, without contact, a surface texture of an interior wall of a cylinder portion of a measurable object while displacing in a normal direction of the interior wall at each measurement region into which the interior wall is divided in a circumferential direction of the cylinder portion; a W axis displacer displacing the measurement sensor in a W axis direction; a θ axis displacer displacing the measurement sensor in the circumferential direction, after measurement of the surface texture of a first measurement region, such that the measurement sensor faces a second measurement region adjacent to the first measurement region in the circumferential direction; and a controller adjusting a W axis direction measurement position for measuring the surface texture of the second measurement region while displacing the measurement sensor in the W axis direction.

    INTERFERENCE MEASURING DEVICE
    2.
    发明申请
    INTERFERENCE MEASURING DEVICE 有权
    干扰测量装置

    公开(公告)号：US20150285619A1

    公开(公告)日：2015-10-08

    申请号：US14679236

    申请日：2015-04-06

    Applicant: MITUTOYO CORPORATION

    Inventor： Ken MOTOHASHI ,  Atsushi USAMI

    IPC: G01B11/06 ,  G01B9/02

    CPC classification number: G01B9/0203 ,  G01B9/02028 ,  G01B11/005 ,  G01B2290/65

    Abstract: An interference measuring device comprises: a light source; a beam splitter that causes the light to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light passed the reference optical path and reflection light passed the measurement optical path are combined; a reference light diverging part that causes the light diverged into the reference optical path, to further diverge into a plurality of optical paths and that causes reflection light beams respectively passed the optical paths to be input into the beam splitter; and a plurality of reference mirrors that are respectively arranged in the optical paths such that optical path lengths of the optical paths are different from each other, and that reflect reference light. An interference image is imaged by varying the optical path length of either the reference optical path or the measurement optical path.

    Abstract translation: 干涉测量装置包括：光源; 分束器，其使光分散到参考光路和测量光路中，并且输出反射光通过参考光路并且反射光通过测量光路的组合波; 引起光分散到参考光路中的参考光发散部分进一步发散成多个光路，并使得反射光束分别通过光路以被输入到分束器中; 以及多个参考反射镜，其分别布置在光路中，使得光路的光路长度彼此不同，并且反射参考光。 通过改变参考光路或测量光路的光程长度来成像干涉图像。

    OPTICAL INTERFERENCE MEASURING DEVICE
    3.
    发明申请
    OPTICAL INTERFERENCE MEASURING DEVICE 审中-公开

    公开(公告)号：US20190277628A1

    公开(公告)日：2019-09-12

    申请号：US16293027

    申请日：2019-03-05

    Applicant: MITUTOYO CORPORATION

    Inventor： Ken MOTOHASHI ,  Johannes Anna QUAEDACKERS ,  Adriaan Tiemen ZUIDERWEG

    IPC: G01B11/24 ,  G01B9/02

    Abstract: An interferometric optical device that measures the curved wall shape of a cylindrical object and includes: an interferometric optical system that emits measurement light at the curved wall of the object, collects the light reflected by the object, and creates a composite wave that combines the reflected light and a reference light; a rotation drive assembly that is connected to the interferometric optical system and rotationally displaces the interferometric optical system centered about a rotation axis that coincides with a center axis of the cylindrical shape of the object; a sensor that acquires a two-dimensional distribution of the intensity of the composite wave using a plurality of photoreceptor elements arrayed two-dimensionally; and a computation device that computes the internal wall shape of the object based on the plurality of two-dimensional distributions acquired in a state where a rotation angle for the rotation drive mechanism varies.

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