Invention Application
US20150292085A1 METHOD FOR PRODUCING A LAYER ON A SURFACE AREA OF AN ELECTRONIC COMPONENT 审中-公开
在电子元件的表面区域上生成层的方法

  • Patent Title: METHOD FOR PRODUCING A LAYER ON A SURFACE AREA OF AN ELECTRONIC COMPONENT
  • Patent Title (中): 在电子元件的表面区域上生成层的方法
  • Application No.: US14646004
    Application Date: 2013-11-18
  • Publication No.: US20150292085A1
    Publication Date: 2015-10-15
  • Inventor: Richard BaislMichael Popp
  • Applicant: OSRAM OLED GmbH
  • Priority: DE102012221080.6 20121119
  • International Application: PCT/EP2013/074068 WO 20131118
  • Main IPC: C23C16/455
  • IPC: C23C16/455 C23C16/48 C23C16/04
METHOD FOR PRODUCING A LAYER ON A SURFACE AREA OF AN ELECTRONIC COMPONENT
Abstract:
The invention relates to a method for producing at least one layer (1) on a surface area (2) of an optoelectronic component (100, 101, 102, 103, 104, 105) comprising a functional layer sequence (41) with an active area which is suitable to produce or to detect the light when the optoelectronic component is in operation. Said method consists of the following steps: introducing the surface area (2) into a coating chamber (10); depositing the at least one layer (1) according to a flash-light supported atomic layer deposition method in which the surface area (2) is exposed to at least one gaseous first initial material (21) or at least one gaseous first initial material (21) and subsequently a gaseous second initial material (22) to form the at least one layer (1), and molecules of the first and/or second initial material (21, 22), which are absorbed on the surface area, are exposed to at least one flash of light, the molecules absorbed on the surface area being split.
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