Invention Application
- Patent Title: NANOTUBE STRUCTURE BASED METAL DAMASCENE PROCESS
- Patent Title (中): 基于纳米结构的金属吸附工艺
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Application No.: US14738967Application Date: 2015-06-15
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Publication No.: US20150311157A1Publication Date: 2015-10-29
- Inventor: Ravi Joshi , Juergen Steinbrenner
- Applicant: Infineon Technologies AG
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/311 ; H01L21/285 ; H01L21/02 ; H01L23/528 ; H01L21/768

Abstract:
In various embodiments a method for manufacturing a metallization layer on a substrate is provided, wherein the method may include forming a plurality of groups of nanotubes over a substrate, wherein the groups of nanotubes may be arranged such that a portion of the substrate is exposed and forming metal over the exposed portion of the substrate between the plurality of groups of nanotubes.
Public/Granted literature
- US10043750B2 Nanotube structure based metal damascene process Public/Granted day:2018-08-07
Information query
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