Invention Application
- Patent Title: METHOD FOR CREATING S/TEM SAMPLE AND SAMPLE STRUCTURE
- Patent Title (中): 创建S / TEM样品和样品结构的方法
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Application No.: US14684825Application Date: 2015-04-13
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Publication No.: US20150323429A1Publication Date: 2015-11-12
- Inventor: Jeffrey Blackwood , Stacey Stone
- Applicant: FEI Company
- Main IPC: G01N1/32
- IPC: G01N1/32 ; H01J37/26 ; H01J37/20 ; G01N1/06
Abstract:
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
Public/Granted literature
- US09336985B2 Method for creating S/TEM sample and sample structure Public/Granted day:2016-05-10
Information query
