Invention Application
US20150323816A1 LIGHT MODULATORS AND DIGITAL EXPOSURE APPARATUSES INCLUDING THE SAME
审中-公开
光调制器和数字曝光装置，包括它们
- Patent Title: LIGHT MODULATORS AND DIGITAL EXPOSURE APPARATUSES INCLUDING THE SAME
- Patent Title (中): 光调制器和数字曝光装置，包括它们
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Application No.: US14528394Application Date: 2014-10-30
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Publication No.: US20150323816A1Publication Date: 2015-11-12
- Inventor: Duhyun LEE , Byungkyu LEE
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: KR10-2014-0054428 20140507
- Main IPC: G02F1/017
- IPC: G02F1/017 ; G03F7/20
Abstract:
A light modulator may include: a light modulating unit formed as a pixel-array type by using a PIN diode including multiple quantum wells including a Group-III nitride semiconductor material, and configured to modulate light by electroabsorption; and/or a control unit including a transistor configured to control voltage applied to the PIN diode of the light modulating unit. The PIN diode and the transistor may be arrayed in an active matrix form.
Public/Granted literature
- US10180587B2 Light modulators and digital exposure apparatuses including the same Public/Granted day:2019-01-15
Information query
