Invention Application
US20150330770A1 LIBRARY EXPANSION SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT FOR METROLOGY
审中-公开
图书馆扩展系统，方法和计算机程序产品
- Patent Title: LIBRARY EXPANSION SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT FOR METROLOGY
- Patent Title (中): 图书馆扩展系统，方法和计算机程序产品
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Application No.: US14710462Application Date: 2015-05-12
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Publication No.: US20150330770A1Publication Date: 2015-11-19
- Inventor: Leonid Poslavsky , Liequan Lee
- Applicant: KLA-Tencor Corporation
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/00
Abstract:
A library expansion system, method, and computer program product for metrology are provided. In use, processing within a first multi-dimensional library is performed by a metrology system. During the processing within the first multi-dimensional library, a second multi-dimensional library is identified. The processing is then transitioned to the second multi-dimensional library. Further, processing within the second multi-dimensional library is performed by the metrology system.
Public/Granted literature
- US10648793B2 Library expansion system, method, and computer program product for metrology Public/Granted day:2020-05-12
Information query
