发明申请
- 专利标题: FABRICATING THIN-FILM OPTOELECTRONIC DEVICES WITH ADDED POTASSIUM
- 专利标题(中): 制造添加了磷酸盐的薄膜光电器件
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申请号: US14654464申请日: 2013-12-16
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公开(公告)号: US20150333200A1公开(公告)日: 2015-11-19
- 发明人: Adrian CHIRILA , Stephan BUECHELER , Fabian PIANEZZI , Patrick REINHARD , Ayodhya Nath TIWARI
- 申请人: FLISOM AG , EMPA
- 申请人地址: CH Duebendorf CH Duebendorf
- 专利权人: FLISOM AG,EMPA
- 当前专利权人: FLISOM AG,EMPA
- 当前专利权人地址: CH Duebendorf CH Duebendorf
- 优先权: IBPCTIB/2012/057605 20121221
- 国际申请: PCT/IB2013/060981 WO 20131216
- 主分类号: H01L31/032
- IPC分类号: H01L31/032 ; C23C14/24 ; C23C14/14 ; H01L31/18
摘要:
A method (200) and deposition zone apparatus (300) for fabricating thin-film optoelectronic devices (100), the method comprising: providing a potassium-nondiffusing substrate (110), forming a back-contact layer (120); forming at least one absorber layer (130) made of an ABC chalcogenide material, adding at least two different alkali metals, and forming at least one front-contact layer (150) wherein one of said at least two different alkali metals is potassium and where, following forming said front-contact layer, in the interval of layers (470) from back-contact layer (120), exclusive, to front-contact layer (150), inclusive, the comprised amounts resulting from adding at least two different alkali metals are, for potassium, in the range of 500 to 10000 ppm and, for the other of said at least two different alkali metals, in the range of 5 to 2000 ppm and at most ½ and at least 1/2000 of the comprised amount of potassium. The method (200) and apparatus (300) are advantageous for more environmentally-friendly production of photovoltaic devices (100) on flexible substrates with high photovoltaic conversion efficiency and faster production rate.
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