发明申请
- 专利标题: HETERODYNE GRATING INTERFEROMETER DISPLACEMENT MEASUREMENT SYSTEM
- 专利标题(中): 异位测量干涉仪位移测量系统
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申请号: US14441821申请日: 2013-10-28
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公开(公告)号: US20150338205A1公开(公告)日: 2015-11-26
- 发明人: Ming ZHANG , Yu ZHU , Leijie WANG , Jinchun HU , Longmin CHEN , Kaiming YANG , Dengfeng XU , Wensheng YIN , Haihua MU
- 申请人: TSINGHUA UNIVERSITY
- 优先权: CN201210449244.9 20121109
- 国际申请: PCT/CN2013/086029 WO 20131028
- 主分类号: G01B11/14
- IPC分类号: G01B11/14 ; G01B9/02
摘要:
A displacement measurement system of heterodyne grating interferometer, comprises a reading head, a measurement grating and an electronic signal processing component. Laser light emitted from the laser tube is collimated, passes through the first polarization spectroscope, and then emits two light beams with a vertical polarization direction and a vertical propagation direction; the two light beams pass through two acousto-optic modulators and respectively generate two first-order diffraction light beams with different frequencies, which are later divided into reference light and measurement light; two parallel reference light beams form a beat frequency electric signal with positive and negative first-order diffraction measurement light respectively after passing through a measurement signal photo-electric conversion unit; the beat frequency signals are transmitted to the electronic signal processing component for signal processing, thus the output of linear displacement in two directions is realized.
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