发明申请
- 专利标题: ENERGY-SENSITIVE RESIN COMPOSITION
- 专利标题(中): 能量敏感性树脂组合物
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申请号: US14758199申请日: 2013-12-25
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公开(公告)号: US20150338734A1公开(公告)日: 2015-11-26
- 发明人: Kunihiro Noda , Hiroki Chisaka , Dai Shiota , Kazuya Someya
- 申请人: TOKYO OHKA KOGYO CO., LTD.
- 优先权: JP2012-288708 20121228
- 国际申请: PCT/JP2013/084649 WO 20131225
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/40 ; G03F7/32 ; G03F7/16 ; G03F7/20
摘要:
The present invention provides an energy-sensitive resin composition, a method of manufacturing a polyimide film or a polyimide molded product in which said composition is used, and a method of forming a pattern in which said composition is used. The composition supplies a polyimide resin exhibiting exceptional thermal resistance and low permittivity even by a heat treatment at a low temperature. The composition contains polyamic acid obtained by reacting tetracarboxylic dianhydride and diamine, a solvent, and a compound (A) decomposing by the action of light and/or heat and generating a base and/or an acid. The method of manufacturing a polyimide film or a polyimide molded product includes forming a coating film or molded product comprising the composition and decomposing the compound (A) in the film or product through exposure or heating. The method of forming a pattern sequentially includes forming, selectively exposing, developing and heating the film or product.
公开/授权文献
- US09529258B2 Energy-sensitive resin composition 公开/授权日:2016-12-27
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