Invention Application
- Patent Title: LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Patent Title (中): 激光装置和极光超紫外光发生系统
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Application No.: US14748332Application Date: 2015-06-24
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Publication No.: US20150340838A1Publication Date: 2015-11-26
- Inventor: Masato MORIYA , Takashi SUGANUMA , Osamu WAKABAYASHI
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: C/O GIGAPHOTON INC.
- Current Assignee: C/O GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Priority: JP2013-017272 20130131
- Main IPC: H01S3/23
- IPC: H01S3/23 ; H01S3/223 ; H01S3/00 ; H05G2/00
Abstract:
There may be included: a master oscillator configured to output pulsed laser light; two or more power amplifiers disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and an optical isolator provided between adjacent two of the power amplifiers in the optical path of the pulsed laser light, and configured to suppress transmission of light traveling from the power amplifiers to a side where the master oscillator is provided.
Public/Granted literature
- US09667019B2 Laser apparatus and extreme ultraviolet light generation system Public/Granted day:2017-05-30
Information query
