Invention Application
US20150345949A1 INTERFEROMETRIC MEASUREMENT DEVICE COMPRISING A FILTERING INTERFEROMETER 有权
包含滤波干涉仪的干涉仪测量装置

  • Patent Title: INTERFEROMETRIC MEASUREMENT DEVICE COMPRISING A FILTERING INTERFEROMETER
  • Patent Title (中): 包含滤波干涉仪的干涉仪测量装置
  • Application No.: US14653330
    Application Date: 2013-12-12
  • Publication No.: US20150345949A1
    Publication Date: 2015-12-03
  • Inventor: Joachin HONTHAASHerve LEFEVREEric DUCLOUXJean-Jacques BONNEFOIS
  • Applicant: IXBLUE
  • Priority: FR1262363 20121219
  • International Application: PCT/FR2013/053059 WO 20131212
  • Main IPC: G01C19/64
  • IPC: G01C19/64
INTERFEROMETRIC MEASUREMENT DEVICE COMPRISING A FILTERING INTERFEROMETER
Abstract:
An interferometric measurement device includes a broad-spectrum spontaneous emission light source; a measurement interferometer, receiving as input a light signal with input light power and delivering as output a modulated light signal with output light power, the modulated light signal being modulated at a modulation frequency, depending on a physical parameter (ΩR) to be measured and being proportional to the input light power; an optical radiation detector, receiving the modulated light signal exiting from the measurement interferometer and delivering a modulated electrical signal representative of the output light power; a filtering interferometer, insensitive to the physical parameter to be measured, having a free spectral range ISL and a finesse F selected such that an interval of frequencies, centred around an optimal frequency foptim equal to (2k+1) ISL/2, k being a natural number, and of width Δf equal to [0.9−(3/2F)] ISL, includes the modulation frequency of the modulated light.
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