Invention Application
- Patent Title: METHODS FOR PROVIDING SPACED LITHOGRAPHY FEATURES ON A SUBSTRATE BY SELF-ASSEMBLY OF BLOCK COPOLYMERS
- Patent Title (中): 通过块状共聚物自组装提供基板上的间距平面特征的方法
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Application No.: US14764133Application Date: 2014-01-24
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Publication No.: US20150364335A1Publication Date: 2015-12-17
- Inventor: Sander Frederik WUISTER , Tamara DRUZHININA , Mircea DUSA
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- International Application: PCT/EP2014/051451 WO 20140124
- Main IPC: H01L21/308
- IPC: H01L21/308 ; G03F1/50 ; G03F1/80 ; H01L29/78

Abstract:
A method of forming a plurality of regularly spaced lithography features, the method including providing a self-assemblable block copolymer having first and second blocks in a plurality of trenches on a substrate, each trench including opposing side-walls and a base, with the side-walls having a width therebetween, wherein a first trench has a greater width than a second trench; causing the self-assemblable block copolymer to self-assemble into an ordered layer in each trench, the layer having a first domain of the first block alternating with a second domain of the second block, wherein the first and second trenches have the same number of each respective domain; and selectively removing the first domain to form regularly spaced rows of lithography features having the second domain along each trench, wherein the pitch of the features in the first trench is greater than the pitch of the features in the second trench.
Public/Granted literature
- US09368366B2 Methods for providing spaced lithography features on a substrate by self-assembly of block copolymers Public/Granted day:2016-06-14
Information query
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