发明申请
- 专利标题: ULTRA-SENSITIVE RADIATION DOSIMETERS
- 专利标题(中): 超敏感辐射剂
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申请号: US13611162申请日: 2012-09-12
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公开(公告)号: US20150369925A1公开(公告)日: 2015-12-24
- 发明人: Yu-Ming Lin , Jeng-Bang Yau
- 申请人: Yu-Ming Lin , Jeng-Bang Yau
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: G01T1/02
- IPC分类号: G01T1/02 ; H01L51/42 ; H01L29/16 ; H01L51/00 ; H01L31/119 ; H01L31/18
摘要:
A method of forming a transistor comprises forming a conducting substrate layer, forming a dielectric layer over the conducting substrate layer, forming a channel over at least a portion of the dielectric layer and forming first and second source/drain regions contacting respective first and second portions of the channel. The channel comprises a thin-film carbon material. The conducting substrate layer, the dielectric layer, the channel and the first and second source/drain regions are formed such that exposure to radiation causes a change in a threshold voltage of the transistor.
公开/授权文献
- US09405017B2 Ultra-sensitive radiation dosimeters 公开/授权日:2016-08-02
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