Invention Application
US20150375994A1 PRESSURE SENSOR AND MANUFACTURE METHOD THEREOF 有权
压力传感器及其制造方法

PRESSURE SENSOR AND MANUFACTURE METHOD THEREOF
Abstract:
A pressure sensor using the MEMS device comprises an airtight ring surrounding a chamber defined by the first substrate and the second substrate. The airtight ring extends from the upper surface of the second substrate to the surface between the first substrate and the second substrate and further breaks out the surface. The pressure sensor utilizes the airtight ring to retain the airtightness of the chamber. The manufacture method of the pressure sensor is also disclosed.
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