发明申请
- 专利标题: SEMICONDUCTOR CHIP AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 半导体芯片及其制造方法
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申请号: US14717606申请日: 2015-05-20
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公开(公告)号: US20150380367A1公开(公告)日: 2015-12-31
- 发明人: Fucheng CHEN
- 申请人: Semiconductor Manufacturing International (Shanghai) Corporation
- 优先权: CN201410308869.2 20140630
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
A chip includes a substrate and a dielectric layer disposed on the substrate. The dielectric layer includes a first dielectric region and a second dielectric region surrounding an outer periphery of the first dielectric region. A top surface of the first dielectric region is disposed below a top surface of the second dielectric region. The chip further includes a metal pad disposed in a through-hole in the first dielectric region and contacting a portion of the substrate.
公开/授权文献
- US09293430B2 Semiconductor chip and method of manufacturing the same 公开/授权日:2016-03-22
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