- 专利标题: Methods and Apparatus of Packaging Semiconductor Devices
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申请号: US14853006申请日: 2015-09-14
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公开(公告)号: US20160005704A1公开(公告)日: 2016-01-07
- 发明人: Chia-Wei Tu , Yian-Liang Kuo , Tsung-Fu Tsai , Ru-Ying Huang , Ming-Song Sheu , Hsien-Wei Chen
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/31
摘要:
Methods and apparatuses for wafer level packaging (WLP) semiconductor devices are disclosed. A redistribution layer (RDL) is formed on a first passivation layer in contact with a conductive pad over a surface of a die. The RDL layer is on top of a first region of the first passivation layer. A second passivation layer is formed on the RDL layer with an opening to expose the RDL layer, and over the first passivation layer. An under bump metallization (UBM) layer is formed over the second passivation layer in contact with the exposed RDL layer. A second region of the first passivation layer disjoint from the first region is determined by projecting an outer periphery of a solder ball or other connector onto the surface.
公开/授权文献
- US09659890B2 Methods and apparatus of packaging semiconductor devices 公开/授权日:2017-05-23
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