Invention Application
- Patent Title: TEMPORARY BONDING LAMINATES FOR USED IN MANUFACTURE OF SEMICONDUCTOR DEVICES AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES
- Patent Title (中): 用于制造半导体器件的临时粘结层压板及制造半导体器件的方法
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Application No.: US14865755Application Date: 2015-09-25
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Publication No.: US20160013088A1Publication Date: 2016-01-14
- Inventor: Ichiro KOYAMA , Yu IWAI , Kazuhiro FUJIMAKI
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM CORPORATION
- Current Assignee: FUJIFILM CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2013-064435 20130326
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C09J123/16 ; H01L21/324 ; C09J125/14

Abstract:
A temporary bonding laminate for use in the manufacture of semiconductor devices and a method for manufacturing semiconductor devices are provided. A member to be processed (a semiconductor wafer or the like) can be temporarily supported securely and readily during a mechanical or chemical process of the member, and then the processed member can be readily released from the temporary support without damaging the processed member even after a high temperature process. The laminate includes: (A) a release layer and (B) an adhesive layer. The release layer contains (a1) a compound being liquid at 25° C. and having a 5% mass reduction temperature of 250° C. or more when measured in a nitrogen gas stream under heating conditions of a constant heating rate of 20° C./min; and (a2) a binder having a 5% mass reduction temperature of 250° C. or more when measured under the same conditions.
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