Invention Application
- Patent Title: DUAL STI INTEGRATED CIRCUIT INCLUDING FDSOI TRANSISTORS AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 包含FDSOI晶体管的双层集成电路及其制造方法
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Application No.: US14771025Application Date: 2013-02-28
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Publication No.: US20160013205A1Publication Date: 2016-01-14
- Inventor: Maud VINET , Kangguo CHENG , Bruce DORIS , Laurent GRENOUILLET , Ali KHAKIFIROOZ , Yannick LE TIEC , Qing LIU
- Applicant: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES , INTERNATIONAL BUSINESS MACHINES CORPORATION , STMICROELECTRONICS, INC.
- Applicant Address: FR Paris US NY Armonk US TX Coppell
- Assignee: Commissariat a l'energie atomique et aux energies alternatives,International Business Machines Corporation,Stmicroelectronics, Inc.
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives,International Business Machines Corporation,Stmicroelectronics, Inc.
- Current Assignee Address: FR Paris US NY Armonk US TX Coppell
- International Application: PCT/EP13/54113 WO 20130228
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/84 ; H01L21/8238 ; H01L29/06

Abstract:
An integrated circuit, including: a first cell, including: FDSOI transistors; a UTBOX layer lying beneath the transistors; a first well lying beneath the insulator layer and beneath the transistors, the first well having a first type of doping; a first ground plane having a second type of doping, located beneath one of the transistors and between the insulator layer and the first well; a first STI separating the transistors and crossing the insulator layer; a first conductive element forming an electrical connection between the first well and the first ground plane, located under the first STI; a second cell including a second well; a second STI separating the cells, crossing the insulator layer and reaching the bottom of the first and second wells.
Public/Granted literature
- US09570465B2 Dual STI integrated circuit including FDSOI transistors and method for manufacturing the same Public/Granted day:2017-02-14
Information query
IPC分类: