发明申请
- 专利标题: UNDERFILL MATERIAL AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
- 专利标题(中): 使用其制造半导体器件的材料和方法
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申请号: US14423966申请日: 2014-09-10
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公开(公告)号: US20160017191A1公开(公告)日: 2016-01-21
- 发明人: Taichi KOYAMA
- 申请人: DEXERIALS CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: Dexerials Corporation
- 当前专利权人: Dexerials Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2013-187980 20130911
- 国际申请: PCT/JP2014/073967 WO 20140910
- 主分类号: C09J163/00
- IPC分类号: C09J163/00 ; H01L23/00 ; H01L23/29 ; C09J133/20 ; H01L21/56
摘要:
An underfill film material and a method for manufacturing a semiconductor device using the same which enables voidless mounting and favorable solder bonding properties are provided. An underfill material is used which contains an epoxy resin, an acid anhydride, an acrylic resin and an organic peroxide, the underfill material exhibits non-Bingham fluidity at a temperature ranging from 60° C. to 100° C., a storage modulus G′ measured by dynamic viscosity measurement has an inflection point in an angular frequency region below 10E+02 rad/s, and the storage modulus G′ in the angular frequency below the inflection point is 10E+05 Pa or more and 10E+06 Pa or less. This enables voidless packaging and excellent solder connection properties.
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