发明申请
- 专利标题: FILM-FORMING DEVICE
- 专利标题(中): 成膜装置
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申请号: US14779806申请日: 2014-03-17
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公开(公告)号: US20160024658A1公开(公告)日: 2016-01-28
- 发明人: Kentaro SHINODA , Kazunari TAKI , Hideki KANADA , Hiroyuki KOUSAKA , Yasuyuki TAKAOKA
- 申请人: Kentaro SHINODA , Kazunari TAKI , Hideki KANADA , Hiroyuki KOUSAKA , Yasuyuki TAKAOKA
- 申请人地址: JP Nagoya-shi, Aichi
- 专利权人: NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
- 当前专利权人: NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
- 当前专利权人地址: JP Nagoya-shi, Aichi
- 优先权: JP2013069713 20130328
- 国际申请: PCT/JP2014/057087 WO 20140317
- 主分类号: C23C16/511
- IPC分类号: C23C16/511 ; C23C16/458
摘要:
A film-forming device includes: a microwave supplying unit, which supplies microwaves for generating plasma along a treatment surface of a central conductor comprising at least a conductive workpiece material; a negative voltage applying unit, which applies to the workpiece material a negative bias voltage for expanding a sheath layer along the treatment surface of the workpiece material; a microwave transmitting window, which make the microwave, which is supplied by the microwave supplying unit, propagate to the expanded sheath layer through a microwave transmitting surface thereof, and a surrounding wall, which surrounds the microwave transmitting surface of the microwave transmitting window and protrudes beyond the microwave transmitting surface in a propagation direction in which the microwaves propagate.
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